IEEE Robotics and Automation Society Central New England Chapter Tuesday, May 13, 2003 Informal Discussion: 6:00 PM Program: 6:30 PM at Wellesley High School Automation in the Handling and Packaging of MEMS Devices Dr. Faycal Benayad-Cherif Intelligent Automation Systems ABSTRACT This talk describes how automation is used to resolve the handling, the packaging, and the testing of MEMS and MEMS-based products. By eliminating human handling, automation minimizes damages and provides speed, accuracy, and consistency that result in higher quality products manufactured at a lower cost with a higher yield. Packaging and testing of MEMS devices are typically the areas that benefit most from automation. Integrating automation can be even more effective when designed into the packaging process. Very frequently such processes are key to shorter development phases and lower development and packaging costs. Such processes are even more cost-effective when flexible automation is designed in. Flexible automation can be achieved at different levels by developing equipment that is versatile enough to accomplish several steps of an assembly processes and by providing the ability to manufacture different products on the same line. These approaches provide the flexibility needed for frequent changeovers required during small-batch runs while still handling production needs. Packaging optical MEMS faces, not only challenges similar to the packaging of semiconductor components but also requirements inherent to accurately couple onto active and passive optically devices. These approaches rely on robotics and micro- and nano-technology combined with image processing at a sub-micron level. These challenges have been addressed through the use of new technologies that are unique to the photonics industry, such as the use of high-frequency-response and high-accuracy commercial six-axis piezo-stages or commercial linear stages capable of achieving a few nanometers of resolution. This presentation will describe the application of these technologies to the manufacturing and the characterization of various photonic components and solutions, such as MEMS and semiconductor lasers. SPEAKER BIOGRAPHY Dr. Faycal Benayad-Cherif was Manager of Electro-Optics at Nortek Networks, where he developed robotic instrumentation for handling, inspecting, and testing MEMS optical devices. Prior to joining Nortel Network, Dr. Benayad-Cherif was the principal software and hardware manager for the 4Dimensional Imager, a high-speed 3D imaging system. Dr. Benayad-Cherif has received his B.S. in Physics from the University of Algiers and his M.S. in Electrical Engineering and Ph.D. in Engineering Design from Tufts University. Prior to joining Intelligent Automation Systems, Inc., he was a senior engineer at Denning Mobile Robotics, where he developed key systems and algorithms for their robotic platforms, including the development of IR and laser navigation systems. Dr. Benayad-Cherif is the author of several patents in the fields of robotics, sensor fusion, and laser based 3D imaging. MEETING INFORMATION The IEEE Robotics and Automation Society will meet on Tuesday, May 13, 2003, at Wellesley High School at 6:00 PM for informal discussions and for the formal presentation between 6:30 and 7:30 PM. The group will have a no-host dinner afterwards at Bertucci's, where more conversations can take place with the guest speaker. The meetings are open to the general public, and all are welcome at the dinner afterwards. For more information contact Rich Maynard at 978-439-5511 ext 6221 or at his chapter email address: chair@robotics-boston.org DIRECTIONS From Route 128, take either Route 9 or Route 16 west. From the junction of Routes 9 and 16, follow Route 16 (Washington Street) west past the Wellesley Hills commuter rail station (within walking distance of the school), then turn left onto Rice Street. Wellesley High School is on the left. Parking is available in a lot just beyond the school. For a web map showing the location of Wellesley High School, go to the Yahoo map site at http://maps.yahoo.com/ and enter the following information in the indicated locations: Address: 50 Rice St City, State or ZIP: Wellesley, MA The star marker is misplaced slightly to the south. Imagine it about 1 cm toward the top of the map at Rice St. For more information about our Section and Chapter, visit our web site at our registered domain URL http://www.robotics-boston.org/